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ME : microcircuit engineering 91 : International conference on microlithography, September 17-19, 1991, Roma : abstract booklet /

ME : microcircuit engineering 91 : International conference on microlithography, September 17-19, 1991, Roma : abstract booklet / organized by Università di Roma - Tor Vergata and Consiglio Nazionale delle Ricerche. - [S.l.] : [s.n.], stampa 1991 - [293] p. in varie sequenze : ill. ; 21 cm.

Bibliografia.

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