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Plasma Chemistry / hrsg. von S. Vepřek, M. Venugopalan.

Contributor(s): Material type: TextTextPublisher: Berlin ; Boston : De Gruyter, [2022]Copyright date: ©1981Edition: Die Originalausgabe erscheint im Springer-Verlag Berlin-Heidelberg: New York in der Schriftenreihe „Topics in Current Chemistry”, Volume 94, Reprint 2021Description: 1 online resource (130 p.)Content type:
Media type:
Carrier type:
ISBN:
  • 9783112539538
  • 9783112539545
Subject(s): Other classification:
  • online - DeGruyter
Online resources: Available additional physical forms:
  • Issued also in print.
Contents:
Frontmatter -- Contents -- Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization -- The Mechanism and Kinetics of Plasma Polymerization -- Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas
Holdings
Item type Current library Call number URL Status Notes Barcode
eBook eBook Biblioteca "Angelicum" Pont. Univ. S.Tommaso d'Aquino Nuvola online online - DeGruyter (Browse shelf(Opens below)) Online access Not for loan (Accesso limitato) Accesso per gli utenti autorizzati / Access for authorized users (dgr)9783112539545

Frontmatter -- Contents -- Plasma Chemistry of Fluorocarbons as Related to Plasma Etching and Plasma Polymerization -- The Mechanism and Kinetics of Plasma Polymerization -- Elementary Processes at Solid Surfaces Immersed in Low Pressure Plasmas

restricted access online access with authorization star

http://purl.org/coar/access_right/c_16ec

Issued also in print.

Mode of access: Internet via World Wide Web.

In German.

Description based on online resource; title from PDF title page (publisher's Web site, viewed 01. Dez 2022)