Library Catalog

ME : microcircuit engineering 91 : International conference on microlithography, September 17-19, 1991, Roma : abstract booklet / organized by Università di Roma - Tor Vergata and Consiglio Nazionale delle Ricerche.

By: Contributor(s): Material type: TextTextPublication details: [S.l.] : [s.n.], stampa 1991 Description: [293] p. in varie sequenze : ill. ; 21 cmOther classification:
  • Q 111.M51